Case Study 1 - Research University
New Health Sciences Building
Case
Study 2 - Institutional Nanotechnology Research Suite
Case
Study 3 - New Wafer Fab
Case
Study 4 - New MCVD Lab
Case
Study 5 - Academic BSL III Lab
INSTITUTIONAL NANOTECHNOLOGY
RESEARCH SUITE
CLIENT NEED
As part of a multi-year research initiative, this prominent
East Coast university needed to build-out a suite of
research spaces to accommodate a grant-funded nanotechnology
lab.With an impending deadline for completion, schedule
became the driving force to complete the design process
and get long-lead items on order early in the project,
which forced a cohesive basis of design be developed
very early in the project.
DESIGN FEATURES
-
Conversion of a 1550 sq ft space from lab/office
area to a 390 sq ft 209E Class 10 cleanroom, a supporting
Class 100,000 450 sqft space with adjoining service
chases.
-
Make-up air and distribution to support 40,000
CFM clean spaces through direct HEPA connections
and Cleanpak fan filter units.
-
New 20 hp air dryer/compressor and dual 3 hp vacuum
pumps for cleanroom services. New 99.9995% HP N2
distribution system sized for clean process requirements.
-
Retrofit existing 750 sqft lab area with new piping
services: 25 psi air, CDA, gas, process hot and
cold water, semiconductor grade (18Mohm or better)
deionized water, HP N2 and process vac. Acid waste
and venting was provided for both the lab and clean
spaces.
-
Two 15-hp exhaust fans were designed for N+1 redundancy.
Each was capable of maintaining a 6” w.c.
static, 8,000 CFM system. Design included stack/nozzle
flow calculation for proper jet and diffusion from
the stack outlet and motorized isolation for changeover.
-
Lab and cleanroom lighting design including end-user
process needs, energy code compliant and clean space
flow concerns. Occupancy lighting sensors were incorporated
for energy savings.
-
Electrical bus duct tap designed to support the
clean space with 225A service.
DESIGN BENEFITS
-
Converted dirty space into multiuse Class 10 and
100K space with tight +/-2 deg F and 40% Rh +/-
5%.
-
Mitigated demolition of existing services and
retrofitted piping and HVAC system for cost savings.
-
Cascade pressure and containment design maintained
clean space and minimizes infiltration from dirty
areas.
-
Sizing and specifications for high purity process
gas and liquids sufficient for client’s needs.
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